The Electron Microprobe Laboratory is equipped with JEOL JXA-8200 electron microprobe, with five wavelength dispersive spectrometers (12 crystals), an energy dispersive spectrometer and transmission illuminator.
The instrument is designed to measure qualitatively composition of a solid polished material on a microscale with high precision (less then percent relative for major constituents) and low detection limits (commonly a few tens to few hundreds ppm). Sample of interest can be as small as a few microns across. Built on the basis of scanning electron microscope it has all the capabilities of SEM too.
In particular it provides:
- Quantitative chemical analyzes (detection limit is commonly at the level of a few hundreds ppm).
- Qualitative and semi-quantitative EDX express analysis allowing to identify phase and estimate its composition in less than a minute.
Imaging capabilities in:
- secondary electrons (SEI)
- back scattered electrons (BSE = COMPO and TOPO)
- transmitted light under the optical microscope (OMT)
- characteristic X-ray elemental distribution maps